Hi,
I need to know how the equation:
[(CH3)2SiO]4 + H2 + O2
gets balanced. I am trying to vaporize OMCTS in H2 and O2 to deposit SiO2 with some by-products.
Any help is appreciated.
Thanks!
Need help balancing an equation
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- ChenBeier
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Check here:
https://www.sciencedirect.com/science/a ... 9317305379
[(CH3)2SiO]4 + (16+n) O2 + 2n H2 => 8 CO2 + (12 + 2n) H2O + 4 SiO2
The amount of water is driven by the hydrogen.
https://www.sciencedirect.com/science/a ... 9317305379
[(CH3)2SiO]4 + (16+n) O2 + 2n H2 => 8 CO2 + (12 + 2n) H2O + 4 SiO2
The amount of water is driven by the hydrogen.