Need help balancing an equation
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arurvijay
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Joined: 13 Feb 2019
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Need help balancing an equation


Hi,

I need to know how the equation:
[(CH3)2SiO]4 + H2 + O2
gets balanced. I am trying to vaporize OMCTS in H2 and O2 to deposit SiO2 with some by-products.
Any help is appreciated.

Thanks!
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ChenBeier
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Joined: 27 Sep 2017
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Check here:

https://www.sciencedirect.com/science/article/pii/S0022309317305379


[(CH3)2SiO]4 + (16+n) O2 + 2n H2 => 8 CO2 + (12 + 2n) H2O + 4 SiO2

The amount of water is driven by the hydrogen.
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